High resolution SEM (FEG),
Secondary electron detectors, secondary electron detectors for high resolution (In-Beam) and for controlled pressure (LVSTD);
Combined detector for backscattered electrons (scintillator) / cathodoluminescence (350 – 650 nm);
STEM Dark Field / Bright Field detector;
Peltier stage (+10 / -50 °C)
EDS / EBSD microanalysis system:
Nitrogen-free EDS detector (SDD);
Qualitative, quantitative analysis;
Elemental and phase mapping;
Automatic particle analysis;
High resolution EBSD camera;
Coupled EDS / EBSD analysis
Raman spectrometer and SEM-Raman coupling
3 lasers : 514, 632 and 785 nm ;
Objectives x5 to x100 and 50 LW;
Raman mapping and fast imaging Streamline;
Peltier stage -196 / + 600°C;
SEM-Raman coupling interface for Raman acquisition in the SEM